AirSentry® II AMC Monitoring System

The AirSentry II AMC Monitoring System is the most advanced Airborne Molecular Contamination monitor available, utilizing state of-the-art gas detection technology (Ion Mobility Spectrometry, Pulsed Fluorescence) to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. This system contains a 16- or 30-point manifold sampling system and a laptop computer with secure software and communications, and can be configured to detect one or more compounds. In modern cleanrooms, processes and equipment are often spread over a large manufacturing area and multiple floors. Air handlers recirculate the majority of air within a cleanroom and easily spread molecular contamination to unwanted areas, negatively impacting areas far away from the actual contamination source. The AirSentry II AMC Monitoring System provides a central monitoring station that allows for rapid contamination detection and analysis, as well as customizable AMC monitoring strategies to cover a wide number of sample points spread across a facility.

Description

BENEFITS

  • Monitors up to 30 sample locations
    • Low cost per sample point
  • Multiple AMC compounds detected (NH3, Amines, Acids, Chlorides, SO2)
  • Real-time graphical software
  • Alarm monitoring to AMC events or trends
  • Calibrations traceable to the National Institute of Standards and Technology (NIST)
  • Compact size
  • Simplifies track/trace and control aspects of molecular contamination monitoring

APPLICATIONS

  • Multi-point cleanroom and process bay monitoring
  • Determining and monitoring the chemical filter efficiency and effectiveness for multiple lithography tools (upstream/ downstream of filters for each tool)
  • AMC contribution from makeup and recirculation air handlers
  • Long-term contamination trending
  • Baseline and qualification of AMC levels in new cleanrooms
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