Ethernet, RS-232, 4-20 mA outputs
Particle Measuring Systems’ newest Airborne Molecular Contamination (AMC) monitor, the AirSentry II, was designed with performance in mind. A new Ion Mobility Spectrometry (IMS) cell provides part-per-trillion (ppt) sensitivity, fast response, and increased selectivity. Continuous coverage of a critical monitoring point and a central software platform allow for easy data acquisition and analysis. By maximizing the value of contamination information delivered, including high-sensitivity uninterrupted data, the AirSentry II allows smarter decisions to be made for locating, controlling, and preventing molecular contamination.
Benefits
- Continuous AMC monitoring of a critical location
- Robust and reliable data acquisition, control, and analysis
- No moving parts
- Infrequent preventive maintenance
- Ethernet, RS-232, 4-20 mA outputs
- Compact size allows placement in any location
- Single external calibration system ensures analyzer to analyzer matching
Applications
- Exposure optics
- Hazing and lens warranty data
- Reticle stage
- Reticle hazing
- Resist track
- Dispense/develop contamination (t-topping)
- Reticle inspection tool and stockers
- Storage contamination
- Ambient cleanroom monitoring
- Baseline contamination
- Make-up and recirculated air analysis
- Contamination movement
Additional information
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Supporting Materials
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