Chem 20™ Chemical Particle Counter
Sensitivity range: 20 – 100 nm
Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the new PMS Chem 20 Chemical Particle Counter is the world’s most sensitive particle sensor for high purity process chemicals.
Extensive data on chemical distribution and packaging systems proves that the PMS Chem 20 sensor, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.
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