Chem 20™ Chemical Particle Counter

Sensitivity range: 20 – 100 nm

Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the new PMS Chem 20 Chemical Particle Counter is the world’s most sensitive particle sensor for high purity process chemicals.

Extensive data on chemical distribution and packaging systems proves that the PMS Chem 20 sensor, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.

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Description

Features

  • Local data display
  • Larger sample volumes and ultra-low zero counts detect smaller excursions with more relevant statistical data
  • Utilizes existing network with ethernet communication
  • Connects directly to PLC and SCADA systems with 4-20mA
  • Compatible with ozonated water
  • Stainless steel housing and dual HEPA filtration for use in clean environments

Benefits

  • Save operator time with fast cleanup and the ability to move quickly from one sample point to another
  • Speed up analysis time by using shorter sample intervals
  • Respond immediately to contamination with real-time particle measurement
  • FacilityNet Software provides more sophisticated process control
  • Set tighter process control limits with low sample-to-sample variation

Applications

  • Quantifying particle concentration in state- of-the-art ultra pure water (UPW) systems
  • Filter efficiency measurements
  • Trending analysis at lower particle concentrations
  • Detecting bacterial growth in UPW systems
  • Episodic event tracking and alarming
  • Continuous system monitoring
  • Manufacturing process control

Download PDF SpecSheet

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