Sensitivity range: 0.05 – 0.2 μm
HSLIS e-Series Particle Counters (Liquid, Chemical & Deionized Water) M65e, M100e & M50e
The HSLIS e-Series (High Sensitivity Liquid In Situ) particle counter provides continuous, real-time monitoring of contamination levels in DI water and process chemicals. The combination of high sensitivity and low cost makes it ideal when large numbers of sensors and/or long term trending are required. The HSLIS e-Series has sizing sensitivity down to 0.05 microns in DI water and 0.065 microns in process chemicals. Integration of the HSLIS e-Series into Particle Measuring Systems’ Facility Net software provides an economical way to monitor multiple flow systems and provide dedicated local display and control capabilities.
Benefits
- Monitor for long term trends in fluid quality
- Lower overall costs with the control and monitoring of multiple particle counters with Ethernet networks
- Low initial capital investment and lower maintenance cost with proven reliability of the HSLIS design
HSLIS e-Series with Facility Net
- Existing network can be utilized with Ethernet communication to Facility Net software
- Tabular and statistical process control (SPC) charts for detailed statistical information
- Alphanumeric paging and e-mailing functions to alert operator of data excursions
- Sensor status displays four-level alarm for monitoring out-of-spec condition
- Simplified data interpretation with real-time and retrieved data time plots
Applications
- Quantifying particle concentrations in DI water systems
- Monitoring chemical delivery systems
- Measuring filter efficiency
- Detecting bacterial growth in DI water systems
- Episodic event tracking and alarming
- Continuous system monitoring
Additional information
| Product Type | In-line |
|---|---|
| Media | Chemicals, Water |
| Application | Chemical Distribution, Chemical Manufacturing, Ultrapure Water / DI Water |
| Smallest Particle Size | 50nm |
Supporting Materials
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