LiQuilaz® Liquid Particle Counter

LiQuilaz® II Liquid Particle Counter S Series

Models S02, S03, S05

S02: 0.2 – 2.0 µm, S03: 0.3 – 3.0 µm, S05: 0.5 – 20.0 µm

The LiQuilaz® optical particle counters are volumetric particle counters with a variety of sizing sensitivities as low as 0.2 μm. They provide high-precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306 °F (150 °C).

Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance.

Download PDF SpecSheet

Description

Features

0.2 – 20.0 μm size range
Up to 80 ml/min flow rate
Compatible with a wide range of process chemicals
Small footprint for easy placement anywhere in the process
User-selected particle size threshold

Benefits

Real-time characterization and analysis of particle contamination allows for immediate response to contamination
Volumetric measurements provide greater accuracy for tighter process control
Optional software makes process control easy with alarm settings, status conditions, sampler setup, and online help
Supports a wide range of applications and fluids
Works with compression or syringe samplers
Compatible with various tubing standards
In-line and batch sampling capabilities
RS-485 and Ethernet networking compatibility
Small footprint for easy placement anywhere in the process
Flexible software provides numerous viewing options for real-time or retrieved data
User-selectable particle size thresholds

Applications

Effervescent chemical measurements using compression sampling
Chemical quality assurance
Process bath monitoring
DI water monitoring
Chemical delivery systems
Photoresist monitoring

Download PDF SpecSheet

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LiQuilaz® II Liquid Particle Counter S Series

S02: 0.2 – 2.0 µm, S03: 0.3 – 3.0 µm, S05: 0.5 – 20.0 µm