Sensitivity range: 40 nm to 150 μm
Models: 1040, 1100, 1200, 1300, 1500, 2000
The SLS Syringe Sampling System uses a precision syringe and simple flow-path for delivering chemical samples from a sample vessel or chemical container, directly to the particle sensor. It is ideal for applications where precise, small-volume particle sampling is required, where the sampler device cannot contribute contamination to the chemical sample.
The system consists of a selectable syringe for either corrosive or non-corrosive liquids, a selectable particle counter for different sizing sensitivities, and batch-sampling software.
The following SLS product systems are available:
| Particle Sampler Name | SLS-1040 | SLS-1100 | SLS-1200 | SLS-1300 | SLS-1500 | SLS-2000 |
|---|---|---|---|---|---|---|
| Paricle Counter | UltraChem 40 | UltraChem 100 | LiQuilaz S02 | LiQuilaz S03 | LiQuilaz S05 | LiQuilaz E15 or E20P |
| Minimum Particle Size | 40 nm | 100 nm | 0.2 μ | 0.3 μ | 0.5 μ | 1.5 μ |
| Particle Size Range | 40 to 125 nm | 100 to 500 nm | 02 to 2.0 μm | 0.3 to 3.0 μm | 0.5 to 20 μm | 1.5 to 125 μm (E15) 2.0 to 125 μm (E20P) |
| # Size Channels | 4 | 4 | 15 | 15 | 15 | 15 |
| Sample Flow Rate | 5 ml/min | 20 ml/min | 20 ml/min | 20 ml/min | 20 ml/min | 20 ml/min |
| Sample Flow Rate | 5 ml/min | 20 ml/min | 20 ml/min | 20 ml/min | 20 ml/min | 20 ml/min |
Features
- Proven PMS UltraChem or LiQuilaz particle sensors
- Menu-driven data collection – 1, 5, 10 and 25 ml
- Wetted materials compatible with corrosive chemicals
- Compact design with on-board particle sensor
Benefits
- Precise particle measurement
- Versatile – select various particle sensors and syringe sizes
- Cost-effective
- Easy-to-use
- Small sample volume – eliminates sample waste
Applications
- Diverse applications in semiconductor and process chemical manufacturing
- Incoming quality measurement of process chemicals
- Point-of-process monitoring on process tools
- Testing and qualification of chemical components
- Outgoing chemical qualification testing
- Mechanical parts cleanliness testing
Additional information
| Product Type | Batch Sampler, Parts Cleanliness Testing |
|---|---|
| Media | Chemicals, Water |
| Application | Chemical Distribution, Chemical Manufacturing, Parts Cleaning, Ultrapure Water / DI Water |
| Smallest Particle Size | 40nm |
Supporting Materials
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