UltraChem® 40 Liquid Particle Counter

Sensitivity range: 40 – 125 nm

NanoVision Technology — The Visible Advantage Your products need reliable contamination monitoring. You need to detect the smallest particle possible. Now get both — sensitivity to 40 nm particles with the greatest reliability available on the market. If your application requires measuring small particles in chemicals with high molecular scatter, UltraChem 40 is the best tool for the job. NanoVision Technology eliminates the competition between the light scattered by fluid molecules and that from the particles. This makes 40 nm sizing possible for the first time. Background and false counts are a thing of the past.

The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint is counted. The result: Data you can act on with confidence. UltraChem 40 Liquid Particle Counter achieves this sensitivity in chemicals using a low-cost laser diode. The proven long life of the diode enables a three-year warranty for maximum confidence in your particle counter. Finally, the performance you demand from a particle counter you can trust — UltraChem 40.


  • Compatible with a wide-range of chemicals
  • 40nm sensitivity
  • Chemicals include: PGMEA, photoresist solvents, hydrogen fluoride (HF) and sulfuric acid
  • 3-year warranty
  • Solid state laser diode
  • Simple design
  • Online or batch sampling capabilities
  • Multiple communication protocols


  • Large sample volume for improved data quality
  • Adaptive technology makes the instrument immune to most optical contamination See what your particle counter sees
  • Measures small particles in a wide range of chemicals, including high molecular scattering fluids
  • Small footprint allows placement in various locations
  • Quick diagnostics and random distribution alerts you to a real particle event


  • DI water monitoring
  • Chemical distribution monitoring
  • Chemical quality assurance
  • Immersion lithography

Additional information

Product Type

Batch Sampler, In-line




Chemical Distribution, Chemical Manufacturing

Smallest Particle Size


Supporting Materials